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1. Description of samples
For this comparison, two types of periodic array were released by the Club nanoMétrologie. The first was a 2D grating, developed in partnership with the Centre de Nanosciences et de Nanotechnologies (C2N, CNRS / Université de Paris Saclay), whose dimensional properties were unknown (step height and grating pitch). This structure is referred to in the following as "P900H60". The second structure was a VLSI Standards® grating with a calibration certificate for grating pitch and step height. It was supplied by Kummer Semiconductor Technology*.
*In 2014, this company was called JP Kummer.
1.1 Networks P900H60
P900H60 gratings were etched on a silicon wafer. Their grating pitches and...
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Description of samples
Comparison sequence
Bibliography
- (1) - SEPPÄ (J.), KORPELAINEN (V.), BERGSTRAND (S.), KARLSSON (H.), LILLEPEA (L.), LASSILA (A.) - Intercomparison of lateral scales of scanning electron microscopes and atomic force microscopes in research institutes in Northern Europe. - Meas. Sci. Technol., vol. 25, n° 4, DOI: 10.1088/0957-0233/25/4/044013 (2014).
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Standards and norms
- Geometric product specification (GPS) – Surface finish: profile method; standards – Part 1: materialized measurements. ISO - ISO 5436-1 - 2000
- Chemical analysis of surfaces – Scanning probe microscopy – Determination of geometric quantities using scanning probe microscopes: calibration of measuring systems. ISO - ISO 11952 - 2019
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