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3. Protocols
3.1 Two-phase protocol
The comparison was carried out in several stages for the participant (figure 5 ). The first step was to measure the two networks (P900H60 and VLSI) to determine their dimensional characteristics.
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Mechanical and dimensional measurements
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Bibliography
- (1) - SEPPÄ (J.), KORPELAINEN (V.), BERGSTRAND (S.), KARLSSON (H.), LILLEPEA (L.), LASSILA (A.) - Intercomparison of lateral scales of scanning electron microscopes and atomic force microscopes in research institutes in Northern Europe. - Meas. Sci. Technol., vol. 25, n° 4, DOI: 10.1088/0957-0233/25/4/044013 (2014).
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Standards and norms
- Geometric product specification (GPS) – Surface finish: profile method; standards – Part 1: materialized measurements. ISO - ISO 5436-1 - 2000
- Chemical analysis of surfaces – Scanning probe microscopy – Determination of geometric quantities using scanning probe microscopes: calibration of measuring systems. ISO - ISO 11952 - 2019
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