Article | REF: R6741 V1

Comparison of grating size measurements for AFM and SEM calibration

Authors: Alexandra DELVALLÉE, Sébastien DUCOURTIEUX

Publication date: December 10, 2022

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4. Results

4.1 General condition of networks before and after traffic

The quality of the networks used for the comparison is illustrated in figure 10 .

Array quality (VLSI A standard on the left, P900H60 array – LPN 2 on the right) observed by optical microscopy before circulation among participants.
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