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6. Conclusions
The aim of this comparison was to assess the situation in France with regard to the calibration and accuracy of AFM and SEM measurements. To this end, six arrays were circulated among the 26 participants. Three gratings were VLSI standards with a nominal pitch of 1.8 µm and a step height of 40 nm, while the other three were gratings whose pitch and step height were unknown and yet to be determined (nominal grating pitch 900 nm, step height 60 nm). The aim was for each participant to measure the dimensional properties of these two gratings before and after calibration of their instrument.
The comparison showed that the vast majority of instruments were not calibrated and that users were, for the most part, unfamiliar with calibration procedures. By following the protocol provided, participants reduced overall measurement discrepancies by a factor of 2 to 3 for network...
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Bibliography
- (1) - SEPPÄ (J.), KORPELAINEN (V.), BERGSTRAND (S.), KARLSSON (H.), LILLEPEA (L.), LASSILA (A.) - Intercomparison of lateral scales of scanning electron microscopes and atomic force microscopes in research institutes in Northern Europe. - Meas. Sci. Technol., vol. 25, n° 4, DOI: 10.1088/0957-0233/25/4/044013 (2014).
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Standards and norms
- Geometric product specification (GPS) – Surface finish: profile method; standards – Part 1: materialized measurements. ISO - ISO 5436-1 - 2000
- Chemical analysis of surfaces – Scanning probe microscopy – Determination of geometric quantities using scanning probe microscopes: calibration of measuring systems. ISO - ISO 11952 - 2019
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