Article | REF: R6741 V1

Comparison of grating size measurements for AFM and SEM calibration

Authors: Alexandra DELVALLÉE, Sébastien DUCOURTIEUX

Publication date: December 10, 2022

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2. Comparison sequence

The comparison was led by LNE as part of the Club nanoMétrologie ("Instrumentation" technical group) and took place in 2014 and 2015.

As this comparison involved a large number of participants (26 in all), it was decided to circulate two batches of samples, each comprising a P900H60 network and a VLSI standard. A back-up batch was also provided in case of package loss or network damage during the comparison.

Figure 4 explains how the comparison is organized in three stages:

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