Article | REF: R6491 V1

Ellipsometry - Instrumentation and applications

Authors: Frank BERNOUX, Jean-Philippe PIEL, Bernard CASTELLON, Christophe DEFRANOUX, Jean-Hervé LECAT, Pierre BOHER, Jean-Louis STEHLÉ

Publication date: June 10, 2003

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1. Instrumentation

We describe here the case of a rotating polarizer ellipsometer (model SOPRA GESP5) to explain the practical realization of a measuring device (figure 1 ).

The instrument comprises a source arm and a detector arm that can be rotated on a goniometer about an axis passing through the sample surface.

The angle of incidence is defined by the optical axis of the source arm and the normal to the sample surface [34] .

  • Source

    The source used is a high-pressure xenon short-arc lamp with very low residual polarization. It emits across the entire visible, near-ultraviolet and near-infrared spectrum...

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