Article | REF: R6491 V1

Ellipsometry - Instrumentation and applications

Authors: Frank BERNOUX, Jean-Philippe PIEL, Bernard CASTELLON, Christophe DEFRANOUX, Jean-Hervé LECAT, Pierre BOHER, Jean-Louis STEHLÉ

Publication date: June 10, 2003

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4. Comparison with other techniques

Numerous surface analysis techniques are commercially available. Here we give examples of different applications and, for each application, the most commonly used techniques (table 1 gives the performance of these methods).

4.1 Surface characterization

The techniques considered here do not provide information about the depth of the material, but allow the surface appearance of a sample to be visualized at different scales [22] .

  • Stylus measurement

    The tip of a stylus is in contact with the surface and, as it moves horizontally, follows variations in the surface level....

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Comparison with other techniques