Overview
FrançaisRead this article from a comprehensive knowledge base, updated and supplemented with articles reviewed by scientific committees.
Read the articleAUTHORS
-
Frank BERNOUX: Doctor in Optoelectronics
-
Jean-Philippe PIEL: Doctor of Solid State Physics
-
Bernard CASTELLON: INPG engineer
-
Christophe DEFRANOUX: Head of SOPRA's Optical Characterization Laboratory
-
Jean-Hervé LECAT: ESO engineer
-
Pierre BOHER: ECP engineer, PhD in Solid State Physics,
-
Jean-Louis STEHLÉ: Technical Manager SOPRA
INTRODUCTION
After studying the article the principles of ellipsometry and signal acquisition and processing techniques, in this section we describe in more detail the instrumentation, in the case of a rotating polarizer ellipsometer, and present some recent developments and extensions of this technique as described in the first article. We then give a brief overview of ellipsometry's fields of application, and conclude with a comparison with other surface analysis techniques.
Exclusive to subscribers. 97% yet to be discovered!
You do not have access to this resource.
Click here to request your free trial access!
Already subscribed? Log in!
The Ultimate Scientific and Technical Reference
This article is included in
Mechanical and dimensional measurements
This offer includes:
Knowledge Base
Updated and enriched with articles validated by our scientific committees
Services
A set of exclusive tools to complement the resources
Practical Path
Operational and didactic, to guarantee the acquisition of transversal skills
Doc & Quiz
Interactive articles with quizzes, for constructive reading
Ellipsometry
References
Exclusive to subscribers. 97% yet to be discovered!
You do not have access to this resource.
Click here to request your free trial access!
Already subscribed? Log in!
The Ultimate Scientific and Technical Reference