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Article | REF: R6491 V1

Ellipsometry - Instrumentation and applications

Authors: Frank BERNOUX, Jean-Philippe PIEL, Bernard CASTELLON, Christophe DEFRANOUX, Jean-Hervé LECAT, Pierre BOHER, Jean-Louis STEHLÉ

Publication date: June 10, 2003 | Lire en français

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    3. Fields of application

    3.1 Microelectronics

    In addition to the applications already described in 2 , spectroscopic ellipsometry is used in all fields involving thin films or surface studies [12][18] . Nevertheless, microelectronics is still the field of choice for which this technique is the...

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