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1. Merit functions useful for describing binary optics
1.1 Working assumptions
For the remainder of this document, it is assumed that scalar diffraction theory applies to describe the light diffracted by binary optics. It is therefore assumed that the components are illuminated in unpolarized light and do not introduce polarizing effects on the light that would be due to patterns of comparable size to the wavelength and/or with etch depths inducing possible guiding effects.
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Merit functions useful for describing binary optics
Pinhole camera
Bibliography
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Unified optical design software " Wyrowski VirtualLab Fusion ", developed by Wyrowski Photonics UG, distributed and supported by LightTrans GmbH, Jena, Germany
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The study of binary optics is an old discipline and belongs to the toolbox of the researcher/engineer who can revisit these concepts according to his or her application needs. The bulk of current work in photolithography is in the field of nanotechnology and plasmonics, which are not covered in this article. The teams mentioned below have published papers that inspired this article, or their work is known to the authors. Nevertheless,...
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