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5. Appendix: extending the notion of binary optics
With the development of photolithography, the notion of binary optics can be extended, increasing the number of possible components. A binary component can therefore be considered as an optic that can be produced from a single photolithography mask, or even from a few masks.
Thus, a Fresnel lens can be approximated by a multi-level profile, 2 levels being the initial definition of binary optics; N photolithography steps produce a component composed of 2 N phase levels. The result is a discrete multi-level profile made up of N staircases (figure 13 ).
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Appendix: extending the notion of binary optics
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Bibliography
Software tools
Unified optical design software " Wyrowski VirtualLab Fusion ", developed by Wyrowski Photonics UG, distributed and supported by LightTrans GmbH, Jena, Germany
Directory
The study of binary optics is an old discipline and belongs to the toolbox of the researcher/engineer who can revisit these concepts according to his or her application needs. The bulk of current work in photolithography is in the field of nanotechnology and plasmonics, which are not covered in this article. The teams mentioned below have published papers that inspired this article, or their work is known to the authors. Nevertheless,...
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