![](/assets/images/picto-drapeau-france-3a76576a5d60a512053b4612ab58dae5.png)
1. Materials synthesis
1.1 Silicon on sapphire
The architectures of MOSFETs on bulk Si and SOI are shown in figure 1 . Silicon On Sapphire (SOS, figure 2 a) is the godfather of the SOI family. Epitaxial growth of a thin film of silicon on a bulk substrate of sapphire (Al 2 O 3 ) materializes in the formation of small islands of Si that eventually coalesce. The interfacial transition region contains numerous defects, residues...
Exclusive to subscribers. 97% yet to be discovered!
You do not have access to this resource.
Click here to request your free trial access!
Already subscribed? Log in!
![](/assets/images/logo-eti-286623ed91fa802ce039246e516e5852.png)
The Ultimate Scientific and Technical Reference
This article is included in
Electronics
This offer includes:
Knowledge Base
Updated and enriched with articles validated by our scientific committees
Services
A set of exclusive tools to complement the resources
Practical Path
Operational and didactic, to guarantee the acquisition of transversal skills
Doc & Quiz
Interactive articles with quizzes, for constructive reading
Materials synthesis
Bibliography
Websites
Events
Exclusive to subscribers. 97% yet to be discovered!
You do not have access to this resource.
Click here to request your free trial access!
Already subscribed? Log in!
![](/assets/images/logo-eti-286623ed91fa802ce039246e516e5852.png)
The Ultimate Scientific and Technical Reference