Article | REF: E2380 V2

Silicon-on-insulator technology

Authors: Sorin CRISTOLOVEANU, Francis BALESTRA

Publication date: August 10, 2013, Review date: January 13, 2021

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6. Partially depleted transistors

In the case of partially depleted MOS/SOI transistors, the depletion charge controlled by one or two gates does not extend from one interface to the other. A neutral region remains and, consequently, interface coupling effects are suppressed. When the silicon layer is grounded (via independent contacts on the silicon film or direct source/film connections), partially depleted SOI devices behave similarly to those fabricated on bulk silicon. Most of the I DS equations (V GS , V DS ) and conventional architecture concepts can be applied. If body contacts are not available, so-called floating-substrate effects occur, leading to several major drawbacks which are explained below.

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Partially depleted transistors