9. Conclusion

For the third millennium, the SOI offers the opportunity to integrate high-performance devices and/or innovative elements that will push back the integration frontiers of CMOS technologies and play a substantial role in the micro-nanoelectronics of the future.

The short-term prospects for SOI microelectronics will depend significantly on the penetration rate of SOI circuits in the low-voltage/low-power, high-frequency market. Not only does SOI guarantee better performance in this area, but most of the disadvantages (self-heating, hot carrier effect, premature breakdown, etc.) tend to disappear when operating at low voltage.

A key point is the industrial strategy, which must be geared to overcoming the cultural barrier imposed by massive silicon. Major manufacturers (ST, ST-Ericsson) are launching "Fully Depleted" SOI technology for mobile...