![](/assets/images/picto-drapeau-france-3a76576a5d60a512053b4612ab58dae5.png)
4. Characterization of structures
The characterization of SOI materials and devices is a delicate operation, due to the thinness of the silicon film, the presence of buried oxide and the multi-interface configuration of the structure. We also have to contend with special conditions (mechanical stresses, thickness inhomogeneities) and specific defects .
The full range of physico-chemical techniques (elastic scattering spectroscopy (RBS), Auger electron spectroscopy, secondary ion mass spectrometry (SIMS), X-ray spectrometry, ellipsometry, etc.) and microscopic techniques (transmission electron microscopy (TEM), atomic force microscopy (AFM), etc.) can be used,...
Exclusive to subscribers. 97% yet to be discovered!
You do not have access to this resource.
Click here to request your free trial access!
Already subscribed? Log in!
![](/assets/images/logo-eti-286623ed91fa802ce039246e516e5852.png)
The Ultimate Scientific and Technical Reference
This article is included in
Electronics
This offer includes:
Knowledge Base
Updated and enriched with articles validated by our scientific committees
Services
A set of exclusive tools to complement the resources
Practical Path
Operational and didactic, to guarantee the acquisition of transversal skills
Doc & Quiz
Interactive articles with quizzes, for constructive reading
Characterization of structures
Bibliography
Websites
Events
Exclusive to subscribers. 97% yet to be discovered!
You do not have access to this resource.
Click here to request your free trial access!
Already subscribed? Log in!
![](/assets/images/logo-eti-286623ed91fa802ce039246e516e5852.png)
The Ultimate Scientific and Technical Reference