Article | REF: P866 V2

Scanning electron microscopy -Images, applications and developments

Author: Jacky RUSTE

Publication date: March 10, 2013, Review date: June 1, 2017

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4. New developments in scanning electron microscopy

In recent years, steady progress has been made in the design and manufacture of scanning electron microscopes:

  • to improve spatial resolution by reducing electron lens aberrations, improving detector efficiency and enhancing electron gun brilliance while reducing costs;

  • to adapt its use to the electronic components industry: appropriate "object" chambers, optimized low-voltage operation;

  • to facilitate management through computerization;

  • to integrate the digitization of acquired images right from the design stage.

More recently, new applications have been developed using special equipment:

  • automatic, methodical use of electron backscatter diffraction (EBSD);...

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New developments in scanning electron microscopy