Archive | REF: P866 V2

Scanning electron microscopy -Images, applications and developments

Author: Jacky RUSTE

Publication date: March 10, 2013, Review date: June 1, 2017 | Lire en français

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    4. New developments in scanning electron microscopy

    In recent years, steady progress has been made in the design and manufacture of scanning electron microscopes:

    • to improve spatial resolution by reducing electron lens aberrations, improving detector efficiency and enhancing electron gun brilliance while reducing costs;

    • to adapt its use to the electronic components industry: appropriate "object" chambers, optimized low-voltage operation;

    • to facilitate management through computerization;

    • to integrate the digitization of acquired images right from the design stage.

    More recently, new applications have been developed using special equipment:

    • automatic, methodical use of electron backscatter diffraction (EBSD);...

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