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3. Instrument
A scanning electron microscope consists of the following components (figure 1 ):
an electron column, comprising an electron gun, a number of electromagnetic lenses ("condensers"), a number of electrical alignment and adjustment coils, and an electron beam scanning device. This column is maintained under vacuum at a minimum level of 10 –3 Pa. In current microscopes, the necessary vacuum is obtained by a primary vane pump coupled with a secondary pumping system consisting of either an oil diffusion pump (or sometimes two in cascade), or a turbomolecular pump. Some higher-performance systems require ion pumping and/or ultra-high-vacuum...
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Conclusion
Bibliography
Events
GNMEBA: two annual meetings, a thematic meeting in spring and a pedagogical meeting in December in Paris, and every 5-6 years a summer school (the last one took place in 2012 in Lille). http://www.gn.meba.org
EMAS: European congress every 2 years and a regional symposium every 2 years in alternation
Standards and norms
ISO TC202 Microbeam analysis – scanning electron microscopy :
TC202/SC1: terminology
TC202/SC2: microanalysis by electron probe
TC202/SC4: scanning electron microscopy.
Directory
Manufacturers – Suppliers – Distributors (non-exhaustive list)
Scanning electron microscopes
Carl Zeiss SMT http://microscopy.zeiss.com/microscopy/en_de/home.html
FEI Company (FEI France, formerly Philips Optique Électronique)
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