Article | REF: NM540 V1

Nanoimprinting and nanomolding

Author: Yong CHEN

Publication date: October 10, 2006

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AUTHOR

  • Yong CHEN

 INTRODUCTION

Miniaturization is a driving concept that has led the microelectronics industry, over the last twenty years, to increase the integration rate to 100 million transistors per chip, with a minimum feature size close to 100 nm. Miniaturization is also a far-reaching concept. It is playing an increasingly important role in the realization of other types of components used in telecommunications, microrobotics, chemistry, biology and biomedical research.

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