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Yong CHEN
INTRODUCTION
Miniaturization is a driving concept that has led the microelectronics industry, over the last twenty years, to increase the integration rate to 100 million transistors per chip, with a minimum feature size close to 100 nm. Miniaturization is also a far-reaching concept. It is playing an increasingly important role in the realization of other types of components used in telecommunications, microrobotics, chemistry, biology and biomedical research.
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