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6. Performance evaluation
The appeal of nanoimprinting and nanomolding lies in their very high resolution and parallel processes. The methods described above are still evolving, and it is difficult to assess their performance definitively. Currently, the performance of nanoimprinting techniques is in competition with other advanced lithography methods. For this reason, the focus will be on the two nanoimprint techniques.
6.1 Resolution
In nanoimprinting, there are no apparent limitations. Thermal nanoimprinting experiments have shown a resolution of a few nanometers for a period as small as 40 nm. Note that these experiments were carried out up to the point of pattern transfer: an imprint in a polymer layer, without transfer to a substrate, will not be considered a demonstration of complete...
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Performance evaluation
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