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Article | REF: NM540 V1

Nanoimprinting and nanomolding

Author: Yong CHEN

Publication date: October 10, 2006

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2. Method classification

2.1 Nanoimprint lithography

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2.1.1 Thermal nanoimprinting

A thin layer of thermoplastic polymer (resin) is first applied to a substrate (sample) using a spinner (see figure 2 ). After heating the mold to a temperature above the polymer's glass transition temperature (T g ), the mold is pressed against the polymer layer with sufficiently high pressure. The system is...

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