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1. Definition
Microsystems, according to the European definition of the term, are intelligent miniaturized multifunctional devices. They combine mechanical, optical, electromagnetic, thermal and fluidic elements with electronics. They act as sensors capable of identifying the physical parameters of their environment (pressure, acceleration, etc.) and/or as actuators capable of acting on this environment.
Microsystems are usually divided into two categories:
those that detect information, called sensors. They collect local information such as thermal, biological, chemical and optical data. Although the term microsystem is often associated with "system with moving parts", some microsystems have no moving parts at all (radio-frequency microsystems, for example);
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Definition
From design to manufacture
- (1) - - http://www.memsnet.org/links/software.html
- (2) - MADOU (M.) - Fundamentals of Microfabrication. - 752 p. 2002 CRC Press.
- (3) - RAI-CHOUDURY...
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