3. Manufacturing technologies
The aim of this section is to describe the different microsystem manufacturing technologies.
They are manufactured using technologies not only used in microelectronics, but also in micromechanics, micro-optics, micromagnetism and chemistry, ...
The most common techniques used to produce microsystems are volume micromachining and surface micromachining. These are the only ones discussed here.
Bulk micromachining (see § 3.4.1 and figure 9 ) is a technique that produces suspended microstructures by etching the substrate. The term "bulk" is used here because etching creates a cavity in the substrate volume beneath the deposited layers.
Surface micromachining...
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Manufacturing technologies
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- (1) - - http://www.memsnet.org/links/software.html
- (2) - MADOU (M.) - Fundamentals of Microfabrication. - 752 p. 2002 CRC Press.
- (3) - RAI-CHOUDURY...
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