Article | REF: E3090 V1

Microsystems: applications and implementation

Authors: Sylvain PAINEAU, Philippe ANDREUCCI, Catherine SCHAFFNIT, Stéphane MAGATON

Publication date: February 10, 2005

You do not have access to this resource.
Click here to request your free trial access!

Already subscribed? Log in!

Français

3. Manufacturing technologies

The aim of this section is to describe the different microsystem manufacturing technologies.

They are manufactured using technologies not only used in microelectronics, but also in micromechanics, micro-optics, micromagnetism and chemistry, ...

The most common techniques used to produce microsystems are volume micromachining and surface micromachining. These are the only ones discussed here.

Bulk micromachining (see § 3.4.1 and figure 9 ) is a technique that produces suspended microstructures by etching the substrate. The term "bulk" is used here because etching creates a cavity in the substrate volume beneath the deposited layers.

Surface micromachining...

You do not have access to this resource.

Exclusive to subscribers. 97% yet to be discovered!

You do not have access to this resource.
Click here to request your free trial access!

Already subscribed? Log in!

The Ultimate Scientific and Technical Reference

A Comprehensive Knowledge Base, with over 1,200 authors and 100 scientific advisors

+ More than 10,000 articles and 1,000 how-to sheets, over 800 new or updated articles every year

From design to prototyping, right through to industrialization, the reference for securing the development of your industrial projects

This article is included in

Material processing - Assembly

This offer includes: