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1. Chemistry and physics at nanoscopic and microscopic scales
In this section, we will briefly examine the chemical and physical conditions that need to be achieved at the atomic scale (dimensions of a few nanometers) and microscopic scale (dimensions of a few micrometers) in a reactor, which typically has dimensions ranging from millimeters to meters in order to achieve an ALD deposit. This aspect is covered in greater detail in several recent articles
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Chemistry and physics at nanoscopic and microscopic scales
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