5. Application examples

The flexibility of the ALD technique and its applicability to a large number of substrate types has led to a wide variety of ALD reactors, suitable for deposition on substrates with a wide range of sizes and shapes.

In the laboratory environment, where small samples with centimeter-scale dimensions need to be processed, user-built machines or simple commercial R&D machines are used (see for example ). A recent development is the use of "open source" kits, designs that circulate freely in the academic community, and enable machines to be built on tight budgets. Often, the same machine can be...