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2. Performance metrics
In this section, we will describe the various performance indicators that need to be taken into consideration when designing and selecting an ALD reactor for a specific application.
2.1 Physico-chemical properties of coatings and precursor chemistry
The first factor to consider is the choice of precursors and the range of deposition temperatures that are targeted. Most modern reactors can handle a large number of precursor chemistry compositions. The use of a certain chemistry can, however, have an impact on the details of reactor implementation. For example, the use of halogen precursors (e.g. TiCl 4 ) can generate reactive corrosion products (e.g. HCl) that can attack certain reactor materials (e.g. aluminum walls)...
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