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Article | REF: R1002 V1

MEMS applications in electrical metrology

Authors: Antti MANNINEN, Anna-Maija KÄRKKÄINEN, Nadine PESONEN, Aarne OJA, Heikki SEPPÄ

Publication date: June 10, 2007 | Lire en français

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    The importance of microsystems, or MEMS, is well established.

    Example

    a modern car contains 20 to 40 accelerometers and other MEMS-based sensors.

    Outside the automotive and transport industries, the main applications for microsystems are in telecommunications, the medical and biotechnology sectors, the environment, and so on. Well-known consumer applications include hard disk read/write heads, inkjet printer heads, accelerometers and pressure sensors.

    In this issue, we look at the applications of micromachined microsystem components for precision electrical measurements, or, more specifically, for electrical metrology.

    MEMS components are characterized by their small size (characteristic dimensions range...

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