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Article | REF: R1002 V1

MEMS applications in electrical metrology

Authors: Antti MANNINEN, Anna-Maija KÄRKKÄINEN, Nadine PESONEN, Aarne OJA, Heikki SEPPÄ

Publication date: June 10, 2007

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2. Principles of microsystems used in electrical metrology

2.1 Microsystems components

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2.1.1 Manufacturing technologies

Silicon micromachining is traditionally divided into two categories: surface micromachining and bulk micromachining . The silicon-on-insulator (SOI) process lies between the two, in terms of structure thickness and lateral resolution. The unconventional LIGA...

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Principles of microsystems used in electrical metrology
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