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Article | REF: R1002 V1

MEMS applications in electrical metrology

Authors: Antti MANNINEN, Anna-Maija KÄRKKÄINEN, Nadine PESONEN, Aarne OJA, Heikki SEPPÄ

Publication date: June 10, 2007 | Lire en français

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    3. DC and low-frequency applications

    Several applications of capacitive microsystems in electrical metrology are described in reference . These include, for example, a voltage divider for high voltages and a current reference. In the present dossier, we detail the applications that have been studied in greater depth: voltage reference microsystems and RMS-DC converters, which are the subject of this paragraph 3

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