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Sébastien DUCOURTIEUX: Nanometrology research engineer - Laboratoire national de métrologie et d'essais (LNE), advanced metrology research center, nanometrology team, Trappes, France
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Benoît POYET: Nanometrology research engineer - Laboratoire national de métrologie et d'essais (LNE), advanced metrology research center, nanometrology team, Trappes, France
INTRODUCTION
This article describes the background to the development and implementation of a metrological atomic force microscope. This is a reference instrument, traceable to the International System of Units and dedicated to the practice of dimensional nanometrology. Its specific design enables measurement uncertainty to be controlled. It is mainly used for calibrating standards commonly employed in the field of near-field microscopy or electron microscopy.
This article describes the context of the development and the implementation of a metrological atomic force microscope. This is a reference instrument traceable to the International System of Units and dedicated to the practice of dimensional nanometrology. Its specific design allows a control of the measurement uncertainty. It is mainly used for the calibration of standards usually employed in the field of scanning probe microscopy or scanning electron microscopy.
atomic force microscopy, dimensional nanometrology, state of the art, traceability, SI, standard.
atomic force microscopy, dimensional nanometrology, State of the art, traceability, SI, standard.
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Mechanical and dimensional measurements
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The metrological atomic force microscope
Introduction
Bibliography
- (1) - The Royal Society & The Royal Academy of Engineering - Nanoscience and nanotechnologies : opportunities and uncertainties - http://www.nanotec.org.uk/finalReport.htm (juillet 2004).
- (2)...
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