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4. Developments in scanning electron microscopy
Since the 2000s, steady progress has been made in the design and manufacture of scanning electron microscopes:
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to improve spatial resolution:
by reducing electronic lens aberrations,
by improving detector performance,
by improving the brilliance of electron guns;
to adapt its use to the electronic components industry and to a multitude of accessories that connect to the SEM: appropriate "object" chambers equipped with many input ports;
for optimizing low and extra-low voltage operation;
to facilitate management through computerization;
to integrate the digitization of acquired images right from...
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Developments in scanning electron microscopy
Applications
Bibliography
Standards and norms
- Microbeam analysis – scanning electron microscopy: - ISO TC202 -
TC202/SC1: terminology
TC202/SC2: electron probe microanalysis
TC202/SC3: analytical electron microscopy
TC202/SC4: scanning electron microscopy.
Directory
Organizations – Federations – Association (non-exhaustive list)
GNMEBA: Groupement National de Microscopie Électronique à Balayage et microAnalyses, available from EDP Sciences, GN-MEBA collection.
Sfmu: Société française des microscopies (more specific to transmission electron microscopy)
SFP: French Physical Society
EMAS: European Microbeam...
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