Article | REF: M1654 V1

Magnetron sputtering

Authors: Alain BILLARD, Frédéric PERRY

Publication date: December 10, 2005, Review date: June 4, 2024 | Lire en français

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    3. Applications and outlook

    The considerable progress made in understanding and controlling the mechanisms behind the formation of metallurgical or ceramic coatings, as well as the reduction in the cost of the various components of a sputtering reactor (pumps, generators) linked to the democratization of this process, have led to its expansion in many fields.

    3.1 Mechanical engineering

    Titanium nitride is the most widely used material in mechanical applications (machining, stamping), and is still the most versatile material in terms of application. Nevertheless, titanium nitride derivatives have been developed for specific applications: TiAIN, TiCrN, TiZrN, TiCN, TiBN (table 2 ). In the nitride class, chromium-based coatings are...

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