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2. Sputtering in a reactive atmosphere
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Sputtering in a reactive atmosphere
Bibliography
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(1) - SIGMUND (P.) -
Theory of sputtering.
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– Phys. Rev., 184 (1969), 383.
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(2) - HOFFMAN (D.W.), THORNTON (J.A.) -
Internal stresses in sputtered chromium.
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Thin Solid Films, 40 (1977), 355.
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Organizations
French Atomic Energy Commission (CEA)
French National Center for Scientific Research (CNRS)
Institut National Polytechnique de Lorraine (INPL)
University of Paris Sud
French Vacuum Society (SFV)
Manufacturer – Suppliers – Distributors (non-exhaustive list)
Surface technology – HEF
PVDco
Balzers
Teer Coatings
Alliance Concept
Mecha-2000
Theses
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BILLARD (A.) -
Étude de la pulvérisation cathodique magnétron des aciers inoxydables austénitiques dans des plasmas réactifs Ar-CH
4
, N
2
ou O
2.
Caractérisation chimique et structurale des dépôts réalisés. Propriétés des revêtements...
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