Français
1. Microelectronics materials
The interest of microelectronics in sensor technology lies above all in the exploitation of associated processes and equipment. Obviously, the use of these techniques requires compatibility both in terms of the shapes of the parts to be processed (flat substrate of calibrated thickness in the shape of a disk, etc.) and in terms of the materials used. Whenever possible, we use materials already known and mastered in the semiconductor industry. As far as thin films are concerned, mechanical and electrical properties are often highly dependent on the deposition process and subsequent heat treatment.
1.1 Silicon
Silicon is the basic material of the microelectronics industry. While its electronic properties have long been known and exploited in the manufacture of...
The Ultimate Scientific and Technical Reference
This article is included in
Electronics
This offer includes:
Knowledge Base
Updated and enriched with articles validated by our scientific committees
Services
A set of exclusive tools to complement the resources
Practical Path
Operational and didactic, to guarantee the acquisition of transversal skills
Doc & Quiz
Interactive articles with quizzes, for constructive reading
Microelectronics materials
Collective micro-machining technology
Bibliography
Laboratories and manufacturers
France
CEA - CEN (Commissariat à l'Énergie Atomique) Saclay
CETEHOR (Centre technique de l'Industrie Horlogère)
École Centrale de Lyon
Entran
ESIEE (École Supérieure d'Ingénieurs en Électrotechnique et en Électronique)
Krohne
LAAS (Laboratory of Automation...
The Ultimate Scientific and Technical Reference
