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Article | REF: E3093 V1

Microelectronic sensors

Authors: Alfred PERMUY, Éric DONZIER, Fadhel REZGUI

Publication date: May 10, 2004, Review date: November 29, 2019

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5. Non-machined sensors

These sensors are generally manufactured using conventional microelectronics processes, i.e. using planar [4] technology, and often exploit the specific physical properties of conventional components such as diodes or transistors.

5.1 Temperature sensors

They are widely used in industry, and can exploit a multitude of physical effects. These include changes in the resistance of lightly doped silicon (thermistor effect), variations in the current/voltage characteristic of PN junctions, and thermopiles. Thermistors can be produced by diffusing impurities into a substrate and contacting it with aluminum metallizations, or by a doped semiconductor disk metallized on both sides.

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