Article | REF: E2381 V1

Fully Depleted Silicon On Insulator (FD-SOI) Devices

Author: Sorin CRISTOLOVEANU

Publication date: November 10, 2018, Review date: January 18, 2021

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3. Specific techniques for characterizing FD-SOI components

3.1 Pseudo-MOSFET method for FD-SOI substrates

The pseudo-MOSFET transistor is activated by applying two pins (source and drain) to the surface of a Si island etched on the FD-SOI plate. . The substrate representing the grid is biased to induce an electron (V BG ...

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Specific techniques for characterizing FD-SOI components