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Article | REF: R6737 V1

Hybrid AFM/SEM metrology for measuring nanoparticle dimensions

Authors: Loïc CROUZIER, Nicolas FELTIN, Alexandra DELVALLÉE

Publication date: December 10, 2020

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4. Size measurement by scanning electron microscopy (SEM)

4.1 Principle of SEM measurement

In Scanning Electron Microscopy (SEM), a focused electron beam "illuminates" the sample locally and scans its surface line by line . The interaction between the incident beam and the atoms making up the sample produces several types of signal: secondary electrons, backscattered electrons, Auger electrons or X-rays. Different types of detectors can then be used to collect the various signals emitted by the sample during scanning. Numerous imaging modes can be used in scanning electron microscopy, depending on the...

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Size measurement by scanning electron microscopy (SEM)
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