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Article | REF: R6737 V1

Hybrid AFM/SEM metrology for measuring nanoparticle dimensions

Authors: Loïc CROUZIER, Nicolas FELTIN, Alexandra DELVALLÉE

Publication date: December 10, 2020

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1. Definition of a nano-object

According to the normative document ISO/TS 80004-1 A nano-object is defined as "a discrete portion of material with one, two or all three external dimensions on the nanometric scale".

As shown in figure 1 , depending on the number of nanometric dimensions, nano-objects are referred to as "nanoparticles" (3D), "nanotubes"...

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Definition of a nano-object
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