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6. Hybrid metrology combining AFM and SEM measurements
6.1 The benefits of this new approach
This new approach, known as "hybrid metrology", enables us to measure the dimensional properties of a nanoparticle population in all three spatial dimensions by combining two complementary techniques: scanning electron microscopy (SEM) and atomic force microscopy (AFM).
SCROLL TO TOP6.2 Comparison of AFM and SEM measurement results on a nanosilica population
A suspension of ERM®-FD304 silica was deposited on the repositioning system following the protocol detailed in section...
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Hybrid metrology combining AFM and SEM measurements
Conclusion
Bibliography
Standards and norms
National standards
- Nanotechnologies – Vocabulary – Part 1: core terms. - XP CEN ISO/TS 80004-1 - 2015
- Nanotechnologies – Guidelines for the physico-chemical characterization of manufactured nano-objects in toxicological tests. - ISO/TR 13014 - 2012
- Rectificatif technique 1 à la norme ISO/TR 13014 de mai 2012. - ISO/TR 13014/AC1 -...
International standards
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