Article | REF: B4110 V1

Very low-pressure gas - Formulas and tables

Author: Guy ROMMEL

Publication date: August 10, 1985

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10. Fluid characteristics for diffusion pumps

Driving fluids for diffusion pumps include esters, mineral oils and silicone oils. The characteristics of some fluids are given in table 8 .

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Fluid characteristics for diffusion pumps