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1. Correspondence between vacuum measurement units
Figure 1 shows the corresponding units used for pressure, desorption rate and gas flow measurements.
Table 1 shows the various units of gas flow.
Let's take a 1 m 2 surface area with a desorption rate of 10 –10 Torr · L / s · cm 2 pumped by a pump with a volume flow rate q v of 1,000 L / s.
The gas flow is :
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Correspondence between vacuum measurement units
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