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Article | REF: RE263 V1

Input of In situ characterisation in atomic layer deposition (ALD) processes.

Authors: Jean-Luc DESCHANVRES, Carmen JIMENEZ

Publication date: October 10, 2016

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5. Acronyms

ALD: Atomic Layer Deposition – Atomic Layer Deposition by alternating flow

ANR: French National Research Agency

DMZ: Dimethylzinc, Zn(CH 3 ) 2

DEZ: Diethylzinc, Zn(C 2 H 5 ) 2

DFT: Density Functional Theory –

DMA: Dimethylamine

EMA: effective-medium-approximation – effective-medium-approximation

EXAFS: Extented X-ray Absorption Fine Structure – analysis of fine X-ray absorption oscillations over an extended range

FTIR: Fourier Transform Infrared spectroscopy.

GISAXS: Grazing...

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