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1. Cold plasma
The aim of this first section is to describe the cold plasmas used in PEALD processes. We will give a definition of cold plasmas and the quantities used to characterize them. For a more detailed description, please refer to the article by Anne-Marie Pointu et al in Techniques de l'ingénieur .
1.1 Definition of cold plasma
The term "plasma" was proposed by Langmuir in 1929 to describe an ionized gas. More rigorously, plasma can be defined as a quasi-neutral gas made up of charged particles (ions + electrons) and neutral molecules characterized by collective behavior....
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Cold plasma
PEALD
Bibliography
Websites
RAFALD (Réseau des Acteurs Français de l'ALD) : http://www.rafald.org
Cold Plasma Network: http: http://plasmasfroids.cnrs.fr
Société Française du Vide (SFV) : http://www.vide.org
...Events
Conferences :
Workshop RAFALD: http://www.rafald.org
AVS annual conference on ALD (in Dublin for 2016) : http://ald2016.com/
Directory
Manufacturers – Suppliers – Distributors (non-exhaustive list)
ALD equipment suppliers and distributors
Encapsulix : http://www.encapsulix.com/fr/
Altatech : http://www.altatech-sc.com/en/index.php
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