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3. Instrument
A scanning electron microscope consists of the following components (figure 1 ):
an electron column, comprising an electron gun, a number of electromagnetic lenses ("condensers"), a number of electrical alignment and adjustment coils, and an electron beam scanning device. This column is maintained under vacuum at a minimum level of 10 –3 Pa. In conventional microscopes (SEM-W), the necessary vacuum is obtained by a primary pump (vane or scroll) coupled with a secondary pumping system (oil diffusion pump, or more frequently turbo-molecular pump). More powerful FEG-SEMs require ion pumping at the electron gun;
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Instrument
Conclusion
Bibliography
Standards and norms
- Microbeam analysis – scanning electron microscopy - ISO TC202 -
- Terminologie - TC202/SC1 -
- Microanalyse par sonde à électrons - TC202/SC2 -
- Microscopie analytique à électrons - TC202/SC3 -
- Microscopie électronique à balayage - TC202/SC4 -
Directory
Organizations – Federations – Associations (non-exhaustive list)
GNMEBA: Groupement National de Microscopie Électronique à Balayage et microAnalyses, GNMEBA publications available from EDP Sciences, GN-MEBA collection.
Sfmu: Société française des microscopies (more specific to transmission electron microscopy)
SFP: French Physical Society
EMAS:...
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