Article | REF: P865 V4

Scanning electron microscopy - Principles and equipment

Authors: François Brisset, Jacky Ruste

Publication date: September 10, 2024

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5. Glossary

Cathodoluminescence; Cathodoluminescence

Spectral or imaging analysis of non-conductive samples, such as semiconductors or insulators, often rocks, emitting in the visible range (from IR to UV). A specific detector must be installed in the SEM chamber.

Détecteur BSE ; BSE detector

Detector placed under the objective lens and above the sample. It can be used to highlight chemical, crystallographic or magnetic contrasts.

EBSD detector; Détecteur EBSD

A camera that captures diffraction patterns from the sample as it scans an area. Their point-by-point analysis provides an image of the crystallographic orientation of the sample's grains.

Détecteur EDS ; EDS detector

Recovers the photons emitted during electron-matter interaction,...

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