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ABSTRACT
The electron probe X-ray microanalysis consists in analyzing the characteristic spectrum of X-rays generated in a target by a finely focused electron beam. This article details the main applications of this analysis technique. The purely qualitative chemical analysis, with the acquisition of an X-ray spectrum, allows for an easy detection of major elements, which is not the case for those in low concentrations. The X-ray cartography provides the repartition of the analyzed element. The electron probe X-ray microanalysis takes a step further; the quantification is made possible due to the electron diffusion inside of the target, ionization, and the photoelectric absorption of the generated X ray.
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Jacky RUSTE: INSA engineer, doctor-engineer, senior engineer - EDF Research and Development, Centre des Renardières - Materials and Component Mechanics Department (Moret-sur-Loing)
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Electron probe X-ray microanalysis
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