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Article | REF: P886 V1

Electron probe X-ray microanalysis - Applications and developments

Author: Jacky RUSTE

Publication date: June 10, 2009

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9. Outlook: sub-micron analysis

The main limitation of microanalysis on massive targets lies in its spatial resolution. While in SIMS it can reach 25 nm (NanoSIMS) and in Auger only a few nanometers, it typically remains in the micrometer range.

Two factors limit spatial resolution: probe diameter d 0 and, above all, electron scattering (cf. [P 885v2] , § 1.4).

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