Article | REF: P2635 V1

Electron energy loss spectrometry in solids

Authors: Paul A. THIRY, Roland CAUDANO, Jean-Jacques PIREAUX

Publication date: October 10, 1995

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2. Electron Energy Loss Spectrometry (EELS)

2.1 Principle of measurement and description of spectrometers

Electron Energy Loss Spectrometry (EELS) measures electronic excitations in the 1 to 100 eV range, resulting in the creation of plasmons, or electronic transitions. Given the energy range in which it operates, EELS does not require high energy resolution: a resolution of the order of 0.3 to 0.5 eV is considered more than sufficient to highlight the structures associated with these characteristic losses.

EELS spectrometers are identical to those used for Auger electron spectrometry and for XPS or ESCA...

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Electron Energy Loss Spectrometry (EELS)