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Article | REF: TRI4700 V1

Tribology of thin film applied to ohmic contact MEMS micro-relays

Authors: Brice ARRAZAT, Karim INAL

Publication date: September 10, 2012

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1. Ohmic MEMS microrelays

1.1 Benefits of ohmic MEMS microrelays

The first ohmic MEMS microrelay consists of a moving part (SiO 2 silicon oxide cantilever) and gold contacts (figure 1 ). A 300 nm-thick gold thin film (Thin Au - figure 1 ) deposited on a chromium hook layer carries the current from the moving part (B - figure

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