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2. Statistical analysis of local deformation of contact surfaces
After deposition of the thin films, the contact surfaces are rough. They are composed of a multitude of asperities (figure 6 ) with different radii of curvature r and heights z. One of the first quantified studies of the evolution of contact surface morphology in ohmic MEMS microrelays was carried out by Gregori and Clarke . In this case, the mechanical sphere/plane contact between two thin gold films was measured at a contact force of 180 µN. The diameter of the residual imprint increases...
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Statistical analysis of local deformation of contact surfaces
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[Scilab] Scilab Consortium (DIGITEO), "Scilab," 5.1 ed : INRIA, 2009.
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