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5. Synthesis of titanium and titanium dioxide films
5.1 Synthesis of metallic titanium films
Increasing the voltage value at the positive pulse during the bipolar HiPIMS regime impacts the structure of metallic titanium films (deposited on doped silicon wafers), as illustrated by Bragg-Brentano X-ray diffraction (XRD) analyses. In this case, a balanced magnetron is used (figure 14 ).
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Synthesis of titanium and titanium dioxide films
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